Interferometers
Micro-Epsilon's innovative white light interferometers set the standard in precise distance and thickness measurement.
These sensors provide stable measurement results with sub-nanometer resolution, offering a relatively large measuring range and offset distance.
Interferometers are available in 3 series: IMS5400-DS to very precise industrial distance measurements , IMS5400-TH for accurate thickness measurement and IMS5600-DS suitable for vacuum applications with picometric resolution.
Properties:
- Absolute distance measurement with nanometer accuracy
- Thickness measurements independent of distance
- Best in class: resolution <30 picometers (IMS5600-DS)
- High signal stability thanks to new evaluation algorithms and active temperature compensation
- Large offset
- Simple parameter configuration via the web interface
- Industry optimized sensors with robust metal housing and flexible cables
- Sensors and cables suitable for vacuum applications
What are interferometers and how do they work?
Interferometers are measuring instruments based on the phenomenon of wave interference. The principle of operation is based on the superimposition of two coherent waves, which leads to the creation of areas of extinction and amplification of vibrations. By observing the emerging interference patterns, it is possible to obtain very accurate measurements. This method is used to measure distances and determine the spatial dimensions of the tested object.
Interferometers for industry and automation
Industrial white light interferometer consists of a robust sensor, a highly flexible sensor cable and a controller in an aluminum housing that can be mounted on a DIN rail. The controller has an active temperature control, which compensates for changes in the ambient temperature and thus achieves great temperature stability.
Due to its robust design, the interferometer can also be integrated in industrial environments. Cable lengths up to 10 m also allow the separation of the sensor and controller. For measuring tasks in clean rooms and vacuums, vacuum-resistant sensors, cables and accessories are available, among others cable glands.
A small light spot detects the finest details and structures
These sensors generate a small light spot over the entire measuring range. The light spot diameter is only 10 µm and enables the detection of fine details such as structures on semiconductors and miniaturized electronic components. The light spot is visualized by a laser with a sight and makes it easier to align the sensor. |  |
Ease of use via web interface
Thanks to the user-friendly web interface, no additional software is needed to configure the controller and sensors. The network interface is accessible via an Ethernet connection and enables quick and easy setting, for example, of averaging, measuring speed and presetting.
Modern interfaces for integration with machines and systems
The controller has integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I / O. This allows for integration interferometer with all control systems and production programs.
