Rozwiązania i Komponenty dla AutomatykiSolutions and Components for Automation

IMS5600-DS White Light Interferometer

The new IMS5600-DS white light interferometer measures distance with the utmost precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with sub-nanometer resolution.

The interferometer is used for measuring tasks with the highest accuracy requirements, e.g. in the production of electronics and semiconductors.


  • Distance measurement with sub-nanometer accuracy
  • Best in class: resolution <30 picometers
  • Absolute measurement, suitable for step profiles
  • Compact and rugged sensors with large offset
  • Measurement frequency up to 6 kHz for high speed measurements
  • Ethernet, EtherCAT, RS422
  • Easy configuration via the web interface
  • Sensors and tubing suitable for vacuum

Absolute distance measurement with large measuring range and offset

The IMS5600-DS is used for very precise displacement and distance measurements.

The system provides absolute measurement values ​​and can therefore also be used to measure step profile distances.

Thanks to the absolute measurement, steps with high signal stability are sampled.

When measuring on moving objects, differences in heights, steps and recesses can thus be reliably detected.

The measuring system offers a resolution below nanometer with a large offset from the measuring range.


Designed for high resolution distance measurements in a vacuum

The IMS5600-DS interferometers can be used for measurement tasks in vacuum and clean rooms where they achieve a resolution in the subnanometer range. For vacuum applications, Micro-Epsilon offers special sensors, cables and conduit accessories. These sensors and cables are substantially free of particles and can be used in cleanrooms and UHV rooms.

Stable distance measurements with the highest precision

The controller can be mounted in a control cabinet via DIN rail mounting and provides very stable measurement results thanks to active temperature compensation and passive cooling. These compact sensors take up extremely little space and have very flexible fiber optic cables.

Cable lengths up to 10 m allow the separation of the sensor and controller. The sensor can be set up quickly and easily thanks to the integrated laser with sight. Commissioning and parameterization are conveniently carried out via the web interface and no software installation is required.

Measure on multiple surfaces
Interferometryczna metoda pomiarowa umożliwia pomiary na wielu powierzchniach. Umożliwia to bardzo precyzyjne pomiary odległości na metalach odbijających światło, tworzywach sztucznych i szkle.


We respect your right to privacy and we protect your personal information. The data you provide in the contact form will allow you to receive the answer to the question (a) in the Message field.

According to art. 13 of the general regulation on the protection of personal data of 27 April 2016 (Journal of Laws UE L 119 of 04.05.2016; hereinafter: RODO) informs you that:

  • The administrator of your Personal Data is P.P.H. WObit E.K.J. Ober s.c., Deborzyce 16, 62-045 Pniewy;
  • with the Data Protection Inspector, you can contact us at the following e-mail address ;
  • the provided personal data will be processed on the basis of art. 6 par. 1 lit. f) RODO; these data will be processed to respond to correspondence and direct marketing of own products, which may be related to the question you are asking us;
  • Your personal data will be kept for a period of time compliant with the Civil Code, necessary to claim any claims;
  • You have the right to request the administrator to access your personal data, the right to rectify it, delete it, limit processing, data transfer rights, the right to object;
  • if it is found that the processing of your personal data violates the provisions of the GDPR, you have the right to lodge a complaint with the Inspector General for Personal Data Protection (after 25 May 2018 - the President of the Office for Personal Data Protection);
  • providing personal data is voluntary, although it must be possible to respond to the message sent; failure to indicate personal data may result in the impossibility of sending to us - the message of the way;
  • Your data will not be stored on servers in a third country / outside of the European economic area;
  • Your personal data will not be processed in an automated way in the form of profiling;
  • Your data will not be processed in other marketing activities;