The new IMS5600-DS white light interferometer measures distance with the utmost precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with sub-nanometer resolution.
The interferometer is used for measuring tasks with the highest accuracy requirements, e.g. in the production of electronics and semiconductors.
Properties:
- Distance measurement with sub-nanometer accuracy
- Best in class: resolution <30 picometers
- Absolute measurement, suitable for step profiles
- Compact and rugged sensors with large offset
- Measurement frequency up to 6 kHz for high speed measurements
- Ethernet, EtherCAT, RS422
- Easy configuration via the web interface
- Sensors and tubing suitable for vacuum
Absolute distance measurement with large measuring range and offset
The IMS5600-DS is used for very precise displacement and distance measurements. The system provides absolute measurement values and can therefore also be used to measure step profile distances. Thanks to the absolute measurement, steps with high signal stability are sampled. When measuring on moving objects, differences in heights, steps and recesses can thus be reliably detected. The measuring system offers a resolution below nanometer with a large offset from the measuring range. | .jpg) |
Designed for high resolution distance measurements in a vacuum
The IMS5600-DS interferometers can be used for measurement tasks in vacuum and clean rooms where they achieve a resolution in the subnanometer range. For vacuum applications, Micro-Epsilon offers special sensors, cables and conduit accessories. These sensors and cables are substantially free of particles and can be used in cleanrooms and UHV rooms.
Stable distance measurements with the highest precision
The controller can be mounted in a control cabinet via DIN rail mounting and provides very stable measurement results thanks to active temperature compensation and passive cooling. These compact sensors take up extremely little space and have very flexible fiber optic cables.
Cable lengths up to 10 m allow the separation of the sensor and controller. The sensor can be set up quickly and easily thanks to the integrated laser with sight. Commissioning and parameterization are conveniently carried out via the web interface and no software installation is required.
Measure on multiple surfaces
Interferometryczna metoda pomiarowa umożliwia pomiary na wielu powierzchniach. Umożliwia to bardzo precyzyjne pomiary odległości na metalach odbijających światło, tworzywach sztucznych i szkle.