The Micro-Epsilon company expands the offer of white light interferometers from the interferoMETER series with a specialized sensor model - IMP DS35/VAC. The device has been designed to operate in vacuum environments, including ultra-high vacuum (UHV). It offers non-contact, absolute distance measurement with a resolution of less than 1 nanometer, while maintaining a large initial distance (offset) of approximately 35 mm. The new sensor is now available from WObit, an authorized distributor of Micro-Epsilon in Poland.
Large offset (35 mm) and high precision for hard-to-reach measurement points
Sensor interferoMETER IMP DS35/VAC has a measurement range of 2.1 mm and the initial offset value is ok. 35mm. Such a large working distance enables safe and precise monitoring of processes without the risk of damaging the tested object or the sensor itself.
This solution works, among others: by:
position monitoring in the glass tile production process,
measurements on coated boards,
applications in low or hard-to-reach places.
The extremely small diameter of the light spot - only 15 µm - allows for stable detection even small structures. The permissible measurement angle of ±1° guarantees repeatable and reliable measurement results even in demanding installation conditions.
Ultra-high vacuum (UHV) ready and support for up to 13 layers
The housing of the IMP DS35/VAC sensor is made of durable stainless steel, which ensures full compatibility with environmental requirements vacuum (including UHV).
The sensor works with advanced controllers from the IMS5400 and IMS5400MP, ensuring measurement parameters at the highest level:
Resolution:< 1 nm
Linearity:< ±50 nm
Multi-point and multi-layer measurements
In combination with the IMS5400MP driver, the system enables multi-point distance measurements on up to 13 layers simultaneously. This opens up completely new possibilities for the accurate analysis of transparent and coated materials and multilayer structures in modern production and control processes.
The most important technical parameters of IMP DS35/VAC
| Parametr | Wartość |
| Zakres pomiarowy | 2,1 mm |
| Początkowy offset | ok. 35 mm |
| Rozdzielczość | < 1 nm |
| Liniowość | < ±50 nm |
| Średnica plamki świetlnej | 15 µm |
| Kąt pomiarowy | ±1° |
| Środowisko pracy | Próżnia / Ultra-wysoka próżnia (UHV) |
| Materiał obudowy | Stal nierdzewna |
| Kompatybilne kontrolery | IMS5400, IMS5400MP (do 13 warstw) |
Pomiary nanometryczne w próżni z WObit
Jako wieloletni partner i dystrybutor marki Micro-Epsilon w Polsce, firma WObit zapewnia pełne wsparcie techniczne przy doborze odpowiednich systemów pomiarowych, w tym czujników i kontrolerów serii interferoMETER.
Zapraszamy do kontaktu z naszymi specjalistami,to learn more about the possibilities of integrating the IMP DS35/VAC sensor in your production and research processes.
